Mu3 Deflektometer

Specular Surface Inspection

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In today's world, specular surface challanges 3D measurement technology.

Based on Phase Measuring Deflectometry, Mu3's specular-surface-inspection function is able to reach nanometer precision. Mu3 technology enables automated optical inspection for glass, metal, wafer, and mirror-like surfaces.

Why should you use Mu3 Deflektometer?


Field of View 100mm x 80mm (Custom sizes available)
Local Sensitivity 50 nm
Measurement Speed 2 seconds
Accuracy Curvature : +- 0.01 Diopter
Measuring Principle Phase Measuring Deflectometry
Operating System Windows 7 / Windows 8 / Windows 10 (32/64-bit)
Interface dll available for custom software development